SAW resonators frequency trimming by plasma etching

Publication
10th International Conference on European Frequency and Time
Record type
Proceedings article
Published
1996
Authors
K. Weiss
DOI
https://doi.org/10.1049/cp:19960037
The publisher of this work supports multiple resolution. The work is available from the following locations:
theiet.org
ieee.org

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https://doi.org/10.1049/cp:19960037
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